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1

Low pressure RF discharge in electronegative gases for plasma processing

V.A. Feoktistov, D.V. Lopaev, K.S. Klopovsky, A.M. Popov, O.B. Popovicheva, A.T. Rakhimov, T.V. Rakhimova

Journal:

Journal of Nuclear Materials

Year:

1993

Language:

english

File:

PDF, 503 KB

english, 1993

2

Experimental and Theoretical Studies of Radical Production in RF CCP Discharge at 81-MHz Frequency in $hbox{Ar/CF}_{4}$ and $hbox{Ar/CHF}_{3}$ Mixtures

Voloshin, D.G., Rakhimova, T.V., Braginsky, O.V., Klopovskiy, K.S., Kovalev, A.S., Lopaev, D.V., Proshina, O.V., Rakhimov, A.T., Shamiryan, D., Vasilieva, A.N.

Journal:

IEEE Transactions on Plasma Science

Year:

2009

Language:

english

File:

PDF, 610 KB

english, 2009

3

Experimental and Theoretical Study of Ion Energy Distribution Function in Single and Dual Frequency RF Discharges

Rakhimova, Tatyana V., Braginsky, Oleg V., Ivanov, Vladimir V., Kovalev, Alexander S., Lopaev, Dmitry V., Mankelevich, Yuri A., Olevanov, Michael A., Proshina, Olga V., Rakhimov, Alexander T., Vasilie

Journal:

IEEE Transactions on Plasma Science

Year:

2007

Language:

english

File:

PDF, 473 KB

english, 2007

4

Experimental and theoretical study of RF plasma at low and high frequency

Rakhimova, T.V., Braginsky, O.V., Ivanov, V.V., Kim, T.K., Kong, J.T., Kovalev, A.S., Lopaev, D.V., Mankelevich, Y.A., Proshina, O.V., Vasilieva, A.N.

Journal:

IEEE Transactions on Plasma Science

Year:

2006

Language:

english

File:

PDF, 1.13 MB

english, 2006

5

The mechanism of low-k SiOCH film modification by oxygen atoms

Braginsky, O. V., Kovalev, A. S., Lopaev, D. V., Malykhin, E. M., Mankelevich, Yu. A., Rakhimova, T. V., Rakhimov, A. T., Vasilieva, A. N., Zyryanov, S. M., Baklanov, M. R.

Journal:

Journal of Applied Physics

Year:

2010

Language:

english

File:

PDF, 970 KB

english, 2010

6

Interaction of F atoms with SiOCH ultra-low- k films: I. Fluorination and damage

Rakhimova, T V, Lopaev, D V, Mankelevich, Yu A, Rakhimov, A T, Zyryanov, S M, Kurchikov, K A, Novikova, N N, Baklanov, M R

Journal:

Journal of Physics D Applied Physics

Year:

2015

Language:

english

File:

PDF, 718 KB

english, 2015

7

A relation between the ion flux and plasma density in an RF CCP discharge.

Bogdanova, Maria, Lopaev, D, Zyryanov, S M, Voloshin, D, Rakhimova, T V

Journal:

Plasma Sources Science and Technology

Year:

2017

Language:

english

File:

PDF, 771 KB

english, 2017

8

Surface recombination of oxygen atoms in O 2 plasma at increased pressure: II. Vibrational temperature and surface production of ozone

Lopaev, D V, Malykhin, E M, Zyryanov, S M

Journal:

Journal of Physics D Applied Physics

Year:

2011

Language:

english

File:

PDF, 1007 KB

english, 2011

9

Low- k films modification under EUV and VUV radiation

Rakhimova, T V, Rakhimov, A T, Mankelevich, Yu A, Lopaev, D V, Kovalev, A S, Vasil'eva, A N, Zyryanov, S M, Kurchikov, K, Proshina, O V, Voloshin, D G, Novikova, N N, Krishtab, M B, Baklanov, M R

Journal:

Journal of Physics D Applied Physics

Year:

2014

Language:

english

File:

PDF, 1.89 MB

english, 2014

10

Recombination of O and H Atoms on the Surface of Nanoporous Dielectrics

Rakhimova, T.V., Braginsky, O.V., Kovalev, A.S., Lopaev, D.V., Mankelevich, Y.A., Malykhin, E.M., Rakhimov, A.T., Vasilieva, A.N., Zyryanov, S.M., Baklanov, M.R.

Journal:

IEEE Transactions on Plasma Science

Year:

2009

Language:

english

File:

PDF, 532 KB

english, 2009

11

The effect of He plasma treatment on properties of organosilicate glass low-k films

Braginsky, O. V., Kovalev, A. S., Lopaev, D. V., Malykhin, E. M., Mankelevich, Yu. A., Proshina, O. V., Rakhimova, T. V., Rakhimov, A. T., Voloshin, D. G., Vasilieva, A. N., Zyryanov, S. M., Smirnov,

Journal:

Journal of Applied Physics

Year:

2011

Language:

english

File:

PDF, 1.03 MB

english, 2011

12

Multi-step reaction mechanism for F atom interactions with organosilicate glass and SiO x films

Mankelevich, Yuri A, Voronina, Ekaterina N, Rakhimova, Tatyana V, Palov, Alexander P, Lopaev, Dmitry V, Zyryanov, Sergey M, Baklanov, Mikhail R

Journal:

Journal of Physics D Applied Physics

Year:

2016

Language:

english

File:

PDF, 2.32 MB

english, 2016

13

Multifold study of volume plasma chemistry in Ar/CF4 and Ar/CHF3 CCP discharges

Proshina, O, Rakhimova, T, Zotovich, Alexey, Lopaev, D, Zyryanov, S, Rakhimov, A

Journal:

Plasma Sources Science and Technology

Year:

2017

Language:

english

File:

PDF, 2.06 MB

english, 2017

14

Ion flux and energy virtual sensor for measuring ion flux and energy distribution at a RF biased electrode in ICP reactor (RIE-mode)

Bogdanova, M A, Lopaev, D V, Zyryanov, S M

Journal:

Journal of Physics Conference Series

Year:

2016

Language:

english

File:

PDF, 3.31 MB

english, 2016

15

Influence of internal stress and layer thickness on the formation of hydrogen induced thin film blisters in Mo/Si multilayers

Bos, R A J M van den, Reinink, J., Lopaev, D.V., Lee, C J, Benschop, J P H, Bijkerk, Fred

Journal:

Journal of Physics D Applied Physics

Year:

2018

Language:

english

File:

PDF, 1.04 MB

english, 2018

16

Ion composition of rf CCP in Ar/H2 mixtures

Bogdanova, Maria, Lopaev, D, Zyryanov, S M, Voloshin, D, Rakhimova, T V

Journal:

Plasma Sources Science and Technology

Year:

2019

Language:

english

File:

PDF, 953 KB

english, 2019

17

Current Design Rules for Welding of Wind Energy Structures for Arctic Conditions

Lopaev, Sergey, Layus, Pavel, Kah, Paul, Parshin, Sergey

Journal:

Key Engineering Materials

Year:

2019

File:

PDF, 1.15 MB

2019

18

Dynamic chaos: Examination of classic and quantum systems from the general standpoint Phenomenon of “selective predictability”

D.V. Lopaev, E.M. Malykhin, V.A. Namiot

Journal:

Physics Letters A

Year:

2005

Language:

english

File:

PDF, 177 KB

english, 2005

19

On the possibility of using ‘dusty’ plasma for X-ray generation by ultra-relativistic electrons

V.A Namiot, D.V Lopaev

Journal:

Physics Letters A

Year:

2000

Language:

english

File:

PDF, 269 KB

english, 2000

20

Heat Treatment of Centrifugally Cast Electroslag Steel

S. N. Zherebtsov, B. E. Lopaev

Journal:

Metal Science and Heat Treatment

Year:

2005

Language:

english

File:

PDF, 106 KB

english, 2005

21

Nonlocal nature of the electron energy spectrum in a glow-discharge in pure O2: II. Actinometry of O(3P) atoms in a plasma at low gas pressures

V. V. Ivanov, K. S. Klopovskii, D. V. Lopaev, A. T. Rakhimov, T. V. Rakhimova

Journal:

Plasma Physics Reports

Year:

2000

Language:

english

File:

PDF, 138 KB

english, 2000

22

Nonlocal nature of the electron energy spectrum in a glow discharge in pure O2: I. Nonlocal character of the electron distribution function

V. V. Ivanov, K. S. Klopovskii, D. V. Lopaev, A. T. Rakhimov, T. V. Rakhimova

Journal:

Plasma Physics Reports

Year:

2000

Language:

english

File:

PDF, 127 KB

english, 2000

23

Kinetics of the reactions involving CF2and CF in a pure tetrafluoromethane plasma: I. Production of CF2and CF via electron-impact dissociation

V. V. Ivanov, K. S. Klopovskii, D. V. Lopaev, O. V. Proshina, A. T. Rakhimov, T. V. Rakhimova, G. B. Rulev

Journal:

Plasma Physics Reports

Year:

2002

Language:

english

File:

PDF, 190 KB

english, 2002

24

Kinetics of the reactions involving CF2and CF in a pure tetrafluoromethane plasma: II. Production and loss of CF2and CF in the processes of fluorocarbon polymerization

V. V. Ivanov, K. S. Klopovskii, D. V. Lopaev, O. V. Proshina, A. T. Rakhimov, T. V. Rakhimova, G. B. Rulev

Journal:

Plasma Physics Reports

Year:

2002

Language:

english

File:

PDF, 218 KB

english, 2002

25

Effect of the nonlocal nature of the electron energy spectrum on the dissociation of oxygen molecules in a discharge

K. S. Klopovskiy, D. V. Lopaev, O. V. Proshina, A. T. Rakhimov, T. V. Rakhimova

Journal:

Plasma Physics Reports

Year:

2004

Language:

english

File:

PDF, 91 KB

english, 2004

26

Diagnostics of heterogeneous processes with the participation of radicals by time-resolved actinometry

D. V. Lopaev, A. V. Smirnov

Journal:

Plasma Physics Reports

Year:

2004

Language:

english

File:

PDF, 171 KB

english, 2004

27

Production of singlet oxygen in a non-self-sustained discharge

A. N. Vasil’eva, K. S. Klopovskii, A. S. Kovalev, D. V. Lopaev, Yu. A. Mankelevich, N. A. Popov, A. T. Rakhimov, T. V. Rakhimova

Journal:

Plasma Physics Reports

Year:

2005

Language:

english

File:

PDF, 172 KB

english, 2005

28

Discharged generator of singlet oxygen for oxygen-iodine laser. Transport kinetics of O2(a1δg) and O2(b1σg+) molecules and O(3P) atoms in Ar:O2and He:O2flows excited by a 13.56-MHz discharge

O. V. Braginsky, A. N. Vasil’eva, K. S. Klopovsky, A. S. Kovalev, D. V. Lopaev, T. V. Rakhimova, A. T. Rakhimov

Journal:

Year:

2006

Language:

english

File:

PDF, 284 KB

english, 2006

29

Measurements of the gas temperature in an oxygen plasma by spectroscopy of the O2(b1Σg+) → O2(X3Σg−) transition

S. M. Zyryanov, D. V. Lopaev

Journal:

Plasma Physics Reports

Year:

2007

Language:

english

File:

PDF, 487 KB

english, 2007

30

Light efficiency of cathodoluminescent screens excited by a runaway electron beam

S. G. Belostotsky, D. V. Lopaev, Yu. A. Mankelevich, E. A. Muratov, A. T. Rakhimov, V. B. Saenko, M. A. Timofeev

Journal:

Plasma Physics Reports

Year:

2008

Language:

english

File:

PDF, 573 KB

english, 2008

31

Loss of hydrogen atoms in H2plasma on the surfaces of materials used in EUV lithography

S. M. Zyryanov, A. S. Kovalev, D. V. Lopaev, E. M. Malykhin, A. T. Rakhimov, T. V. Rakhimova, K. N. Koshelev, V. M. Krivtsun

Journal:

Plasma Physics Reports

Year:

2011

Language:

english

File:

PDF, 332 KB

english, 2011

32

Study of polycrystalline boron-doped diamond films by Raman spectroscopy and optical absorption spectroscopy

V. A. Krivchenko, D. V. Lopaev, P. V. Minakov, V. G. Pirogov, A. T. Rakhimov, N. V. Suetin

Journal:

Technical Physics

Year:

2007

Language:

english

File:

PDF, 198 KB

english, 2007

33

UV detectors based on nanocrystalline ZnO films

V. A. Krivchenko, D. V. Lopaev, P. V. Pashchenko, V. G. Pirogov, A. T. Rakhimov, N. V. Suetin, A. S. Trifonov

Journal:

Technical Physics

Year:

2008

Language:

english

File:

PDF, 344 KB

english, 2008

34

Plasma cleaning of multilayer mirrors in EUV lithography from amorphous carbon contaminations

E. M. Malykhin, D. V. Lopaev, A. T. Rakhimov, T. V. Rakhimova, O. V. Braginskii, A. S. Kovalev, A. N. Vasil’eva, S. M. Zyryanov

Journal:

Moscow University Physics Bulletin

Year:

2011

Language:

english

File:

PDF, 364 KB

english, 2011

35

The structure of thin carbon films deposited at 13.5 nm EUV irradiation

E. M. Malykhin, V. A. Krivchenko, D. V. Lopaev, T. V. Rakhimova, S. M. Zyryanov

Journal:

Moscow University Physics Bulletin

Year:

2011

Language:

english

File:

PDF, 247 KB

english, 2011

36

Removal of amorphous C and Sn on Mo:Si multilayer mirror surface in Hydrogen plasma and afterglow

Braginsky, O. V., Kovalev, A. S., Lopaev, D. V., Malykhin, E. M., Rakhimova, T. V., Rakhimov, A. T., Vasilieva, A. N., Zyryanov, S. M., Koshelev, K. N., Krivtsun, V. M.

Journal:

Journal of Applied Physics

Year:

2012

Language:

english

File:

PDF, 931 KB

english, 2012

37

Experimental and theoretical investigation of oxygen glow discharge structure at low pressures

Ivanov, V.V., Klopovsky, K.S., Lopaev, D.V., Rakhimov, A.T., Rakhimova, T.V.

Journal:

IEEE Transactions on Plasma Science

Year:

1999

Language:

english

File:

PDF, 248 KB

english, 1999

38

Experimental investigation of nonlocality effects in the electron energy spectrum in an electronegative gas

V. V. Ivanov, K. S. Klopovskii, D. V. Lopaev, E. A. Muratov, A. T. Rakhimov, T. V. Rakhimova

Journal:

Year:

1996

Language:

english

File:

PDF, 91 KB

english, 1996

39

Surface recombination of oxygen atoms in O 2 plasma at increased pressure: I. The recombination probability and phenomenological model of surface processes

Lopaev, D V, Malykhin, E M, Zyryanov, S M

Journal:

Journal of Physics D Applied Physics

Year:

2011

Language:

english

File:

PDF, 693 KB

english, 2011

40

Structure and dynamics of a pulsed dc discharge in pure oxygen

Ivanov, V.V., Klopovsky, K.S., Lopaev, D.V., Mankelevich, Y.A., Rakhimov, A.T., Rakhimova, T.V.

Journal:

IEEE Transactions on Plasma Science

Year:

2003

Language:

english

File:

PDF, 703 KB

english, 2003

41

Discharge singlet oxygen generator for oxygen–iodine laser: II. Two-dimensional modelling of flow oxygen rf plasma at 13.56 and 81 MHz power frequency

Proshina, O V, Rakhimova, T V, Braginsky, O V, Kovalev, A S, Lopaev, D V, Mankelevich, Yu A, Rakhimov, A T, Vasilieva, A N

Journal:

Journal of Physics D Applied Physics

Year:

2006

Language:

english

File:

PDF, 1.14 MB

english, 2006

42

UV absorption of vibrationally excited ozone

Lopaev, D V, Malykhin, E M, Namiot, V A

Journal:

Journal of Physics B Atomic Molecular and Optical Physics

Year:

2008

Language:

english

File:

PDF, 1.03 MB

english, 2008

43

Modification of organosilicate glasses low-k films under extreme and vacuum ultraviolet radiation

Rakhimova, T. V., Rakhimov, A. T., Mankelevich, Yu. A., Lopaev, D. V., Kovalev, A. S., Vasil'eva, A. N., Proshina, O. V., Braginsky, O. V., Zyryanov, S. M., Kurchikov, K., Novikova, N. N., Baklanov, M

Journal:

Applied Physics Letters

Year:

2013

Language:

english

File:

PDF, 771 KB

english, 2013

44

Pressure scaling of an electro-discharge singlet oxygen generator (ED SOG)

Braginsky, O V, Kovalev, A S, Lopaev, D V, Proshina, O V, Rakhimova, T V, Rakhimov, A T, Vasilieva, A N

Journal:

Journal of Physics D Applied Physics

Year:

2007

Language:

english

File:

PDF, 599 KB

english, 2007

45

Singlet oxygen generation in O 2 flow excited by RF discharge: I. Homogeneous discharge mode: α-mode

Braginskiy, O V, Vasilieva, A N, Klopovskiy, K S, Kovalev, A S, Lopaev, D V, Proshina, O V, Rakhimova, T V, Rakhimov, A T

Journal:

Journal of Physics D Applied Physics

Year:

2005

Language:

english

File:

PDF, 1.17 MB

english, 2005

46

[American Institute of Aeronautics and Astronautics 34th AIAA Plasmadynamics and Lasers Conference - Orlando, Florida ()] 34th AIAA Plasmadynamics and Lasers Conference - Radio-Frequency Plasma Generation of Singlet Oxygen in O2 and O2:AR (HE) Mixtures

Rakhimova, T., Kovalev, A., Rakhimov, A., Klopovsky, K., Lopaev, D., Mankelevich, Y., Braginsky, O.

Year:

2003

Language:

english

File:

PDF, 443 KB

english, 2003

47

[American Institute of Aeronautics and Astronautics 35th AIAA Plasmadynamics and Lasers Conference - Portland, Oregon ()] 35th AIAA Plasmadynamics and Lasers Conference - Singlet Oxygen Generation in CW and Pulsed RF Discharges at 13.56 and 80 Mhz

Rakhimova, Tatyana, Mankelevich, Yuri, Kovalev, Alexander, Lopaev, Dmitrii, Rakhimov, Alexander, Vasilieva, Anna

Year:

2004

Language:

english

File:

PDF, 542 KB

english, 2004

48

[American Institute of Aeronautics and Astronautics 36th AIAA Plasmadynamics and Lasers Conference - Toronto, Ontario, Canada ()] 36th AIAA Plasmadynamics and Lasers Conference - Experimental and Theoretical Study of a Pressure Scaling Possibility of VHF Singlet Oxygen Generator

Rakhimova, Tatyana, Kovalev, Aleksander, Klopovsky, Konstantin, Lopaev, Dmitrii, Mankelevich, Yuri, Vasilieva, Anna

Year:

2005

Language:

english

File:

PDF, 657 KB

english, 2005

49

[American Institute of Aeronautics and Astronautics 37th AIAA Plasmadynamics and Lasers Conference - San Francisco, California ()] 37th AIAA Plasmadynamics and Lasers Conference - Singlet Oxygen Generator Operating at High Oxygen Pressure

Rakhimova, Tatyana, Kovalev, Aleksandr, Lopaev, Dmitrii, Proshina, Olga, Mankelevich, Yuri, Vasilieva, Anna

Year:

2006

Language:

english

File:

PDF, 575 KB

english, 2006

50

Heterogeneous quenching of O 2 ( 1 Delta g ) molecules in H 2 :O 2 mixtures

Klopovskiy, K S, Lopaev, D V, Popov, N A, Rakhimov, A T, Rakhimova, T V

Journal:

Journal of Physics D Applied Physics

Year:

1999

Language:

english

File:

PDF, 196 KB

english, 1999